A micro-contact and wear model for chemical-mechanical polishing of silicon wafers

By Yongwu Zhao, L. Chang. 2002

312 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/310e0eba8cf3dd1805d457a13ed7a9c048e33195