Fabrication of nanostructures with laser interference lithography

By Q. Xie, M. Hong, H. Tan, G. X. Chen, L. P. Shi, Tow Chong Chong. 2008

181 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/3052434277f03cb0a0c3d2d81248ac74deee7da5