On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

By Jiwang Yan, M. Yoshino, T. Kuriagawa, T. Shirakashi, K. Syoji, Ranga Komanduri. 2001

177 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/2f7cfaaf0c1784b372898bb17d1b15c09a59a73e