EUV lithography: Lithography gets extreme

By C. Wagner, N. Harned. 2010

496 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/2eb86164c1c9d8e6234d937b81ce7eb4780fe48a

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Werayut Srituravanich
2. Alongkorn Pimpin
3. Khadijah A Altammar

In Electrical and Electronic Engineering

1. Werayut Srituravanich
2. Alongkorn Pimpin

Citations in the corpus

• Review on Micro- and Nanolithography Techniques and Their Applications (2012, methodology): “In recent years, immersion lithography [8], resolution enhancement technology [9] and extreme-UV lithography [10] have been developed to improve the lithography”