Fabrication of 10 nm enclosed nanofluidic channels

By H. Cao, Zhaoning Yu, J. Wang, J. Tegenfeldt, R. Austin, E. Chen, Wei Wu, Stephen Y. Chou. 2002

315 citations recorded by the source corpus.

Subfields: Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/2e8963fa97c0ca2f605d0f08d5d48aa9d53333a5

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In Biomedical Engineering

1. Satish G. Kandlikar

Citations in the corpus

• Review of fabrication of nanochannels for single phase liquid flow (2006, methodology): “Figure 11: A schematic illustration of the sputtering deposition process that relies on local shadowing of the NIL features to enclose the channels [23].”