Laser micro-fabrication of concave, low-roughness features in silica
By D. Hunger, C. Deutsch, R. Barbour, R. Warburton, J. Reichel. 2011
162 citations recorded by the source corpus.
We describe a micro-fabrication method to create concave features with ultra-low roughness in silica, either on optical fibers or on flat substrates. The machining uses a single CO2 laser pulse train. Parameters are chosen such that evaporation removes material while a low-viscosity melt layer produces excellent surface quality. A surface roughness σ ∼ 0.2 nm is regularly obtained. The concave depressions are near-spherical close to the center with radii of curvature between 20 and 2000 μm. The method allows fabrication of low-scatter micro-optical devices such as mirror substrates for high-finesse cavities or negative lenses on fiber tips, extending the range of micro-optical components.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/2ddf7d931dc36650039e7be96ded74e83e597bfc
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In Atomic and Molecular Physics, and Optics
In Electrical and Electronic Engineering
Citations in the corpus
- Cavity-based quantum networks with single atoms and optical photons (2014, background): “Optimization of the fabrication process allows for very high finesse (Hunger et al., 2012, 2010) and frequency-degenerate polarization eigenmodes (Uphoff et al., 2014).”
- Highly sensitive D-shaped photonic crystal fiber biological sensors based on surface plasmon resonance (2015, unknown): “Its great potential applications are obvious (Cennamo et al. 2013; Blanc et al. 2011; Gupta and Verma 2009; Hunger et al. 2012).”