Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications

By Saulius Juodkazis, Vygantas Mizeikis, Hiroaki Misawa. 2009

214 citations recorded by the source corpus.

Femtosecond laser fabrication of three-dimensional structures for photonics applications is reviewed. Fabrication of photonic crystal structures by direct laser writing and holographic recording by multiple beam interference techniques are discussed. The physical mechanisms associated with structure formation and postfabrication are described. The advantages and limitations of various femtosecond laser microfabrication techniques for the preparation of photonic crystals and elements of microelectromechanical and micro-optofluidic systems are discussed.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Computational Mechanics

View Paper: https://www.semanticscholar.org/paper/2d97388696235a21bd5bbb21316b2b40ae14a8bf

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Maria Farsari
2. Saulius Juodkazis
3. B. Chichkov

In Biomedical Engineering

1. Maria Farsari
2. Mangirdas Malinauskas
3. Saulius Juodkazis
4. B. Chichkov
5. M. Vamvakaki
6. A. Piskarskas
7. E. Gamaly

In Computational Mechanics

1. Maria Farsari
2. Saulius Juodkazis
3. Mangirdas Malinauskas

Citations in the corpus

• Femtosecond laser polymerization of hybrid/integrated micro-optical elements and their characterization (2010, methodology): “To date, it has been employed in the fabrication of photonic [2–8], micro-optical [9–14], and microfluidic [15, 16] micro/nanodevices.”
• Multiphoton polymerization of hybrid materials (2010, background): “The majority of the materials used for 2PP are designed for conventional lithographic applications and there have been examples of both negative and positive photoresists used [9, 1, 3].”