Pure Silica Zeolite Films as Low‐k Dielectrics by Spin‐On of Nanoparticle Suspensions

By Zhengbao Wang, A. Mitra, Huanting Wang, Limin Huang, Yushan Yan. 2001

156 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Inorganic Chemistry, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/2d63c62abd97e1376ea25aa9508cbd135b9c5d4d

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In Inorganic Chemistry

  1. Huanting Wang

In Materials Chemistry

  1. Yushan Yan
  2. Huanting Wang

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