CMOS-MEMS membrane for audio-frequency acoustic actuation

By J. Neumann, K. J. Gabriel. Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090), 2001

136 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/2d3e34f649f2ed617beedd65033f6d8f16364faa

Citations in the corpus

• Micro-electro-mechanical systems (MEMS)-based micro-scale direct methanol fuel cell development (2006, unknown): “In prior work, CMU has fabricated working acoustic speakers based on similar electrostatically actuated membranes [40,41] (see Fig.”