High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology

By J. Orloff, M. Utlaut, L. Swanson. 2002

135 citations recorded by the source corpus.

Subfields: Computational Mechanics

View Paper: https://www.semanticscholar.org/paper/2cd986ff0d582c6488beba0e23f90f01992712af

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In Computational Mechanics

  1. R. Wirth

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