Direct observation of dislocations propagated from 4H–SiC substrate to epitaxial layer by X-ray topography

By T. Ohno, H. Yamaguchi, S. Kuroda, K. Kojima, Takaya Suzuki, K. Arai. 2004

180 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/2c1a6e12a1407ebe685c587e74586fa38ee1f63c