Fundamental Electron Interactions with Plasma Processing Gases

By L. Christophorou, J. Olthoff. 2003

194 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/2bf4f5a7f4c04a0a98e6f91db0a53f11348fdebe