Electrochemical micromachining with ultrashort voltage pulses–a versatile method with lithographical precision

By M. Kock, V. Kirchner, R. Schuster. 2003

251 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Computational Mechanics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/2bdfb81bfa1174f9ab52a011d585804e7ecabe93

Citations in the corpus

• Microinjection molding of thermoplastic polymers: a review (2007, unknown): “5 μm 1–2 n/a ” ” LIGA UV-LIGA/2D 2–500 μm 1–10 n/a ” ” Femto-second laser 1 μm <1 μm 1–10 Any [32] 2D/3D Excimer laser 6 μm <1 μm 1–10 1 μm– Polymer, ceramics ” 2D/3D 100 nm and metal to a lesser degree Ultra short pulses Few <1 μm 8 [33, 34] ECM 2D/3D micrometers μEDM 2D/3D 10–25 μm 3 μm 10–100 0.”