Iterative learning control, with applications to a wafer-stage

By B. G. Dijkstra. 2004

65 citations recorded by the source corpus.

View Paper: https://www.semanticscholar.org/paper/2b8c322675f79f21d12f5bafaf7832839302f228

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

  1. YangQuan Chen
  2. Hyo-Sung Ahn
  3. Kevin L. Moore
  4. Ivo Petrás
  5. Dingyu Xue
  6. Sun Yi
  7. Jian-xin Xu
  8. R. Stanisławski

Citations in the corpus