FAST TRACK COMMUNICATION: The electrical asymmetry effect in capacitively coupled radio frequency discharges - measurements of dc self bias, ion energy and ion flux

By J. Schulze, E. Schüngel, U. Czarnetzki. 2009

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View Paper: https://www.semanticscholar.org/paper/2b03ce8e907896f58159c4188e1bf9d3af922fc4