Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films
By M. Akiyama, Y. Morofuji, T. Kamohara, K. Nishikubo, M. Tsubai, O. Fukuda, N. Ueno. 2006
163 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering
View Paper: https://www.semanticscholar.org/paper/2abda58d150437f56b5e2807553d3fdd2821bb08
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- Liang He
- Yue Shi
- Xiuyan Li
- Wei Wang
- Luhai Li
- Ruping Liu
- F. Xu
Citations in the corpus
- Recent Developments for Flexible Pressure Sensors: A Review (2018, background): “[43] demonstrated a high-performance piezoelectric sensor with AlN deposited on polyethylene terephthalate (PET) films.”