Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films

By M. Akiyama, Y. Morofuji, T. Kamohara, K. Nishikubo, M. Tsubai, O. Fukuda, N. Ueno. 2006

163 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/2abda58d150437f56b5e2807553d3fdd2821bb08

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  1. Liang He
  2. Yue Shi
  3. Xiuyan Li
  4. Wei Wang
  5. Luhai Li
  6. Ruping Liu
  7. F. Xu

Citations in the corpus