Microstereolithography and other Fabrication Techniques for 3D MEMS

By Vijay K. Varadan, Xiaoning Jiang, V. Varadan. 2001

163 citations recorded by the source corpus.

View Paper: https://www.semanticscholar.org/paper/2a98d5833507d760c097b4f3ca4c961de73bd826

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. Bharat Bhushan
2. Y. Jung
3. K. Koch
4. Michael Nosonovsky
5. W. Barthlott
6. Kesong Liu
7. J. Jeevahan
8. Gregory D. Bixler

Citations in the corpus

• Micro-, nano- and hierarchical structures for superhydrophobicity, self-cleaning and low adhesion (2009, methodology): “A (2009) reliable way of surface structure replication and can provide a precision of the order of 10 nm (Madou 1997; Varadan et al. 2001).”