Low Dielectric Constant Materials for ULSI Interconnects

By M. Morgen, E. T. Ryan, Jie-Hua Zhao, C. Hu, T. Cho, P. Ho. 2000

348 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/29b5bfa6cbe7ea02921f87a3d9b6fba9da0b4bb5