Laser precision engineering: from microfabrication to nanoprocessing

By Tow Chong Chong, M. Hong, Luping P. Shi. 2010

164 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/295ba1b63b98f26cdf350bc1116861d699f17c9e

Citations in the corpus

• Ultrafast Laser Applications in Manufacturing Processes: A State-of-the-Art Review (2019, unknown): “Near-fi eld optical manufacturing is intrinsically limited to the surface, i.e., to 2D, planar lithography [329] which can be conducted with either metallic tip-assisted laser processing or near scanning optical microscopy [330,331].”