The effect of nitrogen addition during high-rate homoepitaxial growth of diamond by microwave plasma CVD

By A. Chayahara, Y. Mokuno, Y. Horino, Y. Takasu, H. Kato, H. Yoshikawa, N. Fujimori. 2004

161 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/28bd66ad9239d6bafd61168fbbf03345e22f8d53