A comprehensive model of stress generation and relief processes in thin films deposited with energetic ions

By M. Bilek, D. Mckenzie. 2006

146 citations recorded by the source corpus.

Subfields: Computational Mechanics, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/28aff692dafa8cd71f951667134ec66dacbe2df2