Piezoelectric MEMS for energy harvesting

By Sang Gook Kim, Shashank Priya, Isaku Kanno. MRS bulletin, 2012

343 citations recorded by the source corpus.

Piezoelectric microelectromechanical systems (MEMS) have been proven to be an attractive technology for harvesting small magnitudes of energy from ambient vibrations. This technology promises to eliminate the need for replacing chemical batteries or complex wiring in microsensors/microsystems, moving us closer toward battery-less autonomous sensors systems and networks. To achieve this goal, a fully assembled energy harvester the size of a US quarter dollar coin (diameter = 24.26 mm, thickness = 1.75 mm) should be able to robustly generate about 100 µW of continuous power from ambient vibrations. In addition, the cost of the device should be sufficiently low for mass scale deployment. At the present time, most of the devices reported in the literature do not meet these requirements. This article reviews the current state of the art with respect to the key challenges such as high power density and wide bandwidth of operation. This article also describes improvements in piezoelectric materials and resonator structure design, which are believed to be the solutions to these challenges. Epitaxial growth and grain texturing of piezoelectric materials is being developed to achieve much higher energy conversion efficiency. For embedded medical systems, lead-free piezoelectric thin films are being developed, and MEMS processes for these new classes of materials are being investigated. Nonlinear resonating beams for wide bandwidth resonance are also being developed to enable more robust operation of energy harvesters.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/2879543c9a2e788d026bb1492c9051af45583697

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Shashank Priya
2. Chong-Yun Kang
3. Alper Erturk
4. Daniel J. Inman
5. Abdessattar Abdelkefi
6. Ali H. Nayfeh

In Electrical and Electronic Engineering

1. Shashank Priya
2. Alper Erturk
3. Daniel J. Inman
4. Abdessattar Abdelkefi
5. Ali H. Nayfeh

In Mechanical Engineering

1. Shashank Priya
2. Chong-Yun Kang
3. Alper Erturk
4. Daniel J. Inman
5. Abdessattar Abdelkefi
6. Ali H. Nayfeh

Citations in the corpus

• Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density (2017, background): “cantilever can be determined from the expression [27]:”