Fabrication and characterization of a nanoelectromechanical switch with 15-nm-thick suspension air gap

By W. Jang, J. Lee, Jun‐Bo Yoon, Min-Sang Kim, Ji-myoung Lee, Sung-min Kim, K. Cho, Dong-Won Kim, Donggun Park, Won-seong Lee. 2008

140 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/28586523cbfc4f4b82e48ba2405f1b34c8f6e417