100 nm period silicon antireflection structures fabricated using a porous alumina membrane mask
By Y. Kanamori, K. Hane, H. Sai, H. Yugami. 2001
250 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Surfaces, Coatings and Films
View Paper: https://www.semanticscholar.org/paper/27b5b5ee37a600f5f09d35b5d91e99117c296662
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In Biomedical Engineering
In Electrical and Electronic Engineering
In Surfaces, Coatings and Films
Citations in the corpus
- Optical properties of deep lamellar Gratings: A coupled Bloch-mode insight (2006, background): “It encompasses a wide variety of applications ranging from the simple case of antireflection coatings [1] to achromatic phase plates [2], [3], polarization beam splitters [4], [5], optical isolators [6], ultrabroadband mirrors [7], [8], high-performance blazed gratings [9], [10] and resonant filters”
- Highly ordered nanostructures with tunable size, shape and properties : A new way to surface nano-patterning using ultra-thin alumina masks (2007, background): “Shape of the nano-holes: (a) slightly conical cylindrical shape (reproduced from [84] with permission, copyright 1999, The Japan Society of Applied Physics); (b) quasi-conical shape (reproduced from [61] with permission, copyright 2002, Wiley-VCH Verlag GmbH); (c) surface-tapered shape (reproduced f”
- Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures. (2007, background): “, producing porous surfaces that can be rather fragile, and other approaches involve lithography, which is often either too expensive or unsuitable for making sub-wavelength structures with high aspect ratios over large area”