Handbook of Semiconductor Manufacturing Technology

By R. Doering, Y. Nishi. 2007

415 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, ML Systems & Hardware

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

  1. T. Leng
  2. K. Chang
  3. Jia-Cing Chen
  4. Xianjun Huang
  5. M. Abdalla
  6. Zhirun Hu

Citations in the corpus