Improved reflectance and stability of Mo-Si multilayers

By S. Bajt, J. Alameda, T. Barbee, W. M. Clift, J. Folta, B. Kaufmann, E. Spiller. 2002

203 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/266bcc4b06c2110bba5e7fda2ad868ba149e7ef1