On the deposition rate in a high power pulsed magnetron sputtering discharge

By J. Alami, K. Sarakinos, G. Mark, Matthias Wuttig. 2006

162 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/257a60724bc0853a4a96b3f748a2e51cf8cfc16a