Formation and stability of lanthanum oxide thin films deposited from β-diketonate precursor

By Minna Nieminen, M. Putkonen, L. Niinistö. 2001

170 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/241b20bfc1aa5261ccd10aff4b185d81605610e7