Deep reactive ion etching as a tool for nanostructure fabrication

By Y. Fu, A. Colli, A. Fasoli, Jikui Luo, Andrew J. Flewitt, Andrea C. Ferrari, William I. Milne. 2009

139 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/23e86e4925e642b1d825e23ceb62a77b364795d2