A novel slurry for chemical mechanical polishing of single crystal diamond

By Longxing Liao, Zhenyu Zhang, Fanning Meng, Dongdong Liu, Bin Wu, Lin Yubiao, Xie Wenxiang. 2021

167 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Civil and Structural Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/23c31d161dd90b099f7e35b47285c2e0bf2dde28