Extreme ultraviolet lithography: A review

By Banqiu Wu, Ajay Kumar. 2007

390 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/23aa6e3787b0806ef398642a8a0e3b4866493edd

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. T. Fennel
2. Karl-Heinz Meiwes-Broer
3. J. Tiggesbäumker
4. P. Dinh
5. Paul-Gerhard Reinhard
6. E. Suraud

Citations in the corpus

• Laser-driven nonlinear cluster dynamics (2009, background): “…efficiencies of about 1%/ 2π sr have been achieved at only 2% bandwidth, underlining that line emission from laser-driven Xe clusters, droplets, or jets, see e.g. (Hansson et al., 2004), might by suitable for next generation microprocessor manufacturing (Attwood, 2007; Wu and Kumar, 2007).”