Glancing Angle Deposition of Thin Films: Engineering the Nanoscale
By M. M. Hawkeye, M. Taschuk, Michael J. Brett. 2014
190 citations recorded by the source corpus.
Subfields: Electronic, Optical and Magnetic Materials, Mechanics of Materials, Surfaces, Coatings and Films
View Paper: https://www.semanticscholar.org/paper/22bcf92615ad247a014de419b05128db909b10d5
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In Mechanics of Materials
In Surfaces, Coatings and Films
Citations in the corpus
- Perspectives on oblique angle deposition of thin films: From fundamentals to devices (2016, background): “Fancy ITO (indium tin oxide) 2D-branched nanostructures have also been fabricated by combining VLS and OAD while azimuthally rotating the substrate [133–137].”