High power pulsed magnetron sputtered CrNX films

By A. Ehiasarian, W. Münz, L. Hultman, Ulf Helmersson, I. Petrov. 2003

264 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/20ccb499d095d865dab9967302456e0ff69488b9