Dynamic Behaviour of Nanoscale Electrostatic Actuators

By Wen-Hui Lin, Ya-pu Zhao. 2003

142 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/1fd37f11912ff400025f5f9970caed1b08b84dee