Multi-range silicon micromachined flow sensor

By N. Sabaté, J. Santander, L. Fonseca, I. Gràcia, C. Cané. 2004

136 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Bioengineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/1f7a6fc9ae2e7d61af53d46ec81feb076c2e23cd

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. Yasin Orooji
2. Fatemeh Ejeian
3. A. Razmjou
4. Shohreh Azadi
5. M. Asadnia
6. M. Warkiani
7. A. Kottapalli

Citations in the corpus

• Design and applications of MEMS flow sensors: A review (2019, methodology): “employed three pairs of sensing elements on a thin Si3N4 membrane [86].”