The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY

By F. Siewert, T. Noll, T. Schlegel, T. Zeschke, H. Lammert. 2004

162 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/1e9235996b2a4b4e752bf2d926094782e3a4b1a2