Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas

By T. Gans, J. Schulze, D. O’Connell, U. Czarnetzki, R. Faulkner, A. Ellingboe, M. Turner. 2006

158 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/1e8cc05a4ed717433d6dfcbf51ba2772828ade69