Growth of ZnO/Al2O3 Alloy Films Using Atomic Layer Deposition Techniques

By Jeffrey W. Elam, S. George. 2003

359 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/1e10ee671c3eea5588df1f5727243e0de945b8b1