Review—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: State-of-the-Art Processing Technologies, Properties, and Applications

By A. Kaloyeros, Youlin Pan, Jonathan Goff, Barry Arkles. 2020

140 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/1e0a7fececac0ffc0a52c5c35e792c63efa3403a