Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer

By L. Liew, Yiping Liu, Ruiling Luo, Tsali Cross, L. An, V. Bright, Martin L. Dunn, J. Daily, Rishi Raj. 2002

186 citations recorded by the source corpus.

Subfields: Ceramics and Composites, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/1d7145d5b6be4ac3c8828514a3c68ac06400b471