CMP of hard disk substrate using a colloidal SiO2 slurry: preliminary experimental investigation

By H. Lei, Jianbin Luo. 2004

137 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Materials Chemistry, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/1d1ff8ab6109c35d78b8efd60eaded45909d02e5