PZT‐Based Piezoelectric MEMS Technology

By Gabriel L. Smith, J. Pulskamp, L. Sanchez, D. Potrepka, R. Proie, T. Ivanov, R. Rudy, W. Nothwang, S. Bedair, C. Meyer and 1 more. 2012

210 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/1cf479ad1876a818c126a96f4e2b76f50eaa36d0