Atomic force acoustic microscopy methods to determine thin-film elastic properties

By D. Hurley, K. Shen, N. Jennett, J. Turner. 2003

177 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/1c84ef87241ef76c89213069fa0079c9d85e0dd1