Modified Deal Grove model for the thermal oxidation of silicon carbide

By Y. Song, S. Dhar, L. Feldman, G. Chung, John R. Williams. 2004

255 citations recorded by the source corpus.

Subfields: Ceramics and Composites, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/1c74aae78401e20a463b648ee91447df1082d718

Citations in the corpus

• Silica on Silicon Carbide (2008, unknown): “25 , 26 , 194 , 195 Like the (110) face of 3C-SiC, these faces are non-polar.”