Nanofabrication using focused ion and electron beams : principles and applications

By I. Utke, Stanislav Moshkalev, P. Russell. 2011

198 citations recorded by the source corpus.

View Paper: https://www.semanticscholar.org/paper/1c59c40165a3e4257c98aef13b099b9e682c2450

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1. Michael Huth
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Citations in the corpus

• Focused electron beam induced deposition meets materials science (2017, methodology): “Following this goal setting, this review will give a brief introduction into the basics of FEBID (see [2, 23] for a comprehensive overview) and will then, in particular, address recent developments in the fabrication of all-metal FEBID structures, discuss FEBID approaches to direct-write superconduc”