Nanoscale materials patterning and engineering by atomic force microscopy nanolithography

By X. Xie, H. Chung, C. Sow, A. Wee. 2006

285 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering

View Paper: https://www.semanticscholar.org/paper/1be3021d9e8d806c36a52d8a93bb0571c21cc2fd