Moisture-absorption-induced permittivity deterioration and surface roughness enhancement of lanthanum oxide films on silicon

By Yi Zhao, M. Toyama, K. Kita, K. Kyuno, A. Toriumi. 2006

179 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/1ad3450d16df7b47aee1de966ccc0449f80d0814