Plasma Electronics: Applications in Microelectronic Device Fabrication

By T. Makabe, Z. Petrović. 2006

336 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/1957e984d294af0426e24c0bbf90ae18e3a98618

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1. M. I. Khan
2. Rizwan Shoukat

Citations in the corpus

• Carbon nanotubes: a review on properties, synthesis methods and applications in micro and nanotechnology (2021, background): “1 What is plasma? Plasma is considered as forth state of the matter (Zhou et al. 2018; Makabe and Petrovi 2006).”