A DC-to-40 GHz four-bit RF MEMS true-time delay network

By Moonil Kim, J. Hacker, Robert Mihailovich, Jeffrey DeNatale. IEEE Microwave and Wireless Components Letters, 2001

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Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles (2003, methodology): “There have been several demonstrations of MEMS switches used in phase shifter circuits [6], [ 7 ], and applications in reconfigurable antennas have been presented [8].”
MEM relay for reconfigurable RF circuits (2001, methodology): “An accompanying paper demonstrates this technology in a broadband 4-bit True Time Delay Circuit [8].”
Low-loss 2- and 4-bit TTD MEMS phase shifters based on SP4T switches (2003, methodology): “With the advent of RF microelectromechanical system (MEMS) switches, these phase shifters have been redesigned recently using low-loss dc-contact or capacitive MEMS shunt or series switches [ 2 ], [5]‐[7] and the losses have been greatly reduced ( 1.5 to 2.0 dB for 4-bit designs).”
True time-delay beamsteering for radar (2012, methodology): “An example MEMS-based TTD module is discussed in [9].”