High resolution-high energy x-ray photoelectron spectroscopy using third-generation synchrotron radiation source, and its application to Si-high k insulator systems

By Keisuke L. I. Kobayashi, M. Yabashi, Y. Takata, T. Tokushima, Shik Shin, K. Tamasaku, D. Miwa, T. Ishikawa, H. Nohira, T. Hattori and 4 more. 2003

301 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/18272fe2021e33ec1f64dfccc32fcfeec2e39c1e